- 专利标题: PHOTORESIST AND PREPARATION METHOD THEREOF
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申请号: US15993936申请日: 2018-05-31
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公开(公告)号: US20190204727A1公开(公告)日: 2019-07-04
- 发明人: Lixuan CHEN
- 申请人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 优先权: CN201711467218.8 20171228
- 主分类号: G03F1/20
- IPC分类号: G03F1/20 ; G03F1/22
摘要:
The present disclosure provides a photoresist and a preparation method thereof. The photoresist includes at least one kind of resin, a photoinitiator, a solvent, and at least one kind of scattering particle, and the at least one kind of scattering particle being configured to scatter ultraviolet light irradiated into the photoresist. The present disclosure may increase an exposure energy that the photoresist obtains during an exposure process, and thereby may reduce an exposure time required for the photoresist.
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