发明申请
- 专利标题: EMPIRICAL DETECTION OF LENS ABERRATION FOR DIFFRACTION-LIMITED OPTICAL SYSTEM
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申请号: US15962981申请日: 2018-04-25
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公开(公告)号: US20190128825A1公开(公告)日: 2019-05-02
- 发明人: Qin ZHONG , Antoine P. MANENS , Hwan J. JEONG
- 申请人: Applied Materials, Inc.
- 主分类号: G01N21/958
- IPC分类号: G01N21/958 ; G02B26/08 ; G01M11/02 ; G03F7/20
摘要:
A method for qualitatively detecting aberration and determine aberration types in a photolithography system is disclosed. The method includes using a digital micromirror device (DMD) pattern to project an optical signal on a reflective substrate, acquiring a return optical signal reflected from the substrate at different focus heights (ranging from above to below best focus), forming a through focus curve based off of the return optical signal at various focus heights, comparing the through focus curve to a predetermined curve—the predetermined curve being a function of focus, and determining if a lens aberration is present. By using the existing hardware of the photolithography system to determine if a lens aberration exists, costs are maintained at a minimum and the DMD pattern creates a through focus curve (TFC) image in less than five minutes allowing for quick correction.
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