- 专利标题: SENSOR FOR THE DETECTION OF ELECTRICALLY CONDUCTIVE AND/OR POLARIZABLE PARTICLES, SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR AND USE OF SUCH A SENSOR
-
申请号: US16096836申请日: 2017-04-27
-
公开(公告)号: US20190128789A1公开(公告)日: 2019-05-02
- 发明人: Tim ASMUS , Karlheinz WIENAND , Stefan DIETMANN , Martin KUNZ
- 申请人: Heraeus Sensor Technology GmbH
- 申请人地址: DE Hanau
- 专利权人: Heraeus Sensor Technology GmbH
- 当前专利权人: Heraeus Sensor Technology GmbH
- 当前专利权人地址: DE Hanau
- 优先权: DE102016107888.3 20160428
- 国际申请: PCT/EP2017/060037 WO 20170427
- 主分类号: G01N15/06
- IPC分类号: G01N15/06
摘要:
One aspect relates to a sensor for the detection of electrically conductive and/or polarizable particles including a substrate, wherein on at least one side of the substrate in a first level a first structured insulator, in a second level a first structured electrode layer, in a third level a second structured insulator and in a fourth level a second structured electrode layer are either directly or indirectly arranged in such a way that in at least one structured electrode layer and/or a structured insulator at least one opening is formed, which is accessible to the particles to be detected, and wherein the electrode layers have at least two electrodes or at least two conductor tracks or a combination of at least one electrode and at least one conductor track.
信息查询