SENSOR FOR THE DETECTION OF ELECTRICALLY CONDUCTIVE AND/OR POLARIZABLE PARTICLES, SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR AND USE OF SUCH A SENSOR
摘要:
One aspect relates to a sensor for the detection of electrically conductive and/or polarizable particles including a substrate, wherein on at least one side of the substrate in a first level a first structured insulator, in a second level a first structured electrode layer, in a third level a second structured insulator and in a fourth level a second structured electrode layer are either directly or indirectly arranged in such a way that in at least one structured electrode layer and/or a structured insulator at least one opening is formed, which is accessible to the particles to be detected, and wherein the electrode layers have at least two electrodes or at least two conductor tracks or a combination of at least one electrode and at least one conductor track.
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