Invention Application
- Patent Title: IMAGE SENSING APPARATUS AND MANUFACTURING METHOD THEREOF
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Application No.: US15968954Application Date: 2018-05-02
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Publication No.: US20190103425A1Publication Date: 2019-04-04
- Inventor: Sung Hyun YOON , Doo Won KWON , Kwan Sik KIM , In Gyu BAEK , Tae Young SONG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2017-0127985 20170929
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00 ; H01L21/768 ; H01L31/18 ; H01L21/56 ; H01L23/522 ; H01L23/528 ; H01L21/683

Abstract:
A method of manufacturing an image sensing apparatus includes: forming a first substrate structure including a first region of a pixel region, the first substrate structure having a first surface and a second surface; forming a second substrate structure including a circuit region for driving the pixel region, the second substrate structure having a third surface and a fourth surface; bonding the first substrate structure to the second substrate structure, such that the first surface is connected to the third surface; forming a second region of the pixel region on the second surface; forming a first connection via, the first connection via extending from the second surface to pass through the first substrate structure; mounting semiconductor chips on the fourth surface, using a conductive bump; and separating a stack structure of the first substrate structure, the second substrate structure, and the semiconductor chips into unit image sensing apparatuses.
Public/Granted literature
- US10741607B2 Image sensing apparatus and manufacturing method thereof Public/Granted day:2020-08-11
Information query
IPC分类: