- 专利标题: CONDUCTIVE CONNECTORS HAVING A RUTHENIUM/ALUMINUM-CONTAINING LINER AND METHODS OF FABRICATING THE SAME
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申请号: US16072145申请日: 2016-02-25
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公开(公告)号: US20190074217A1公开(公告)日: 2019-03-07
- 发明人: Christopher J. Jezewski , Ramanan V. Chebiam , Jasmeet S. Chawla , Mauro J. Kobrinsky , James S. Clarke
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 国际申请: PCT/US16/19617 WO 20160225
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L21/288 ; H01L23/532 ; C23C18/40
摘要:
A conductive connector for a microelectronic structure may be formed in an opening in a dielectric layer, wherein a ruthenium/aluminum-containing liner is disposed between the dielectric layer and a substantially aluminum-free copper fill material within the opening. The ruthenium/aluminum-containing liner may be formed by depositing a ruthenium-containing liner and migrating aluminum into the ruthenium-containing liner with an annealing process. The aluminum may be presented as a layer formed either before or after the deposition of a copper fill material, or may be presented within a copper/aluminum alloy fill material wherein the annealing process migrates the aluminum out of the copper/aluminum alloy and into the ruthenium-containing liner.
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