Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND A CORRESPONDING METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
-
Application No.: US16048108Application Date: 2018-07-27
-
Publication No.: US20190035740A1Publication Date: 2019-01-31
- Inventor: Samuele SCIARRILLO , Paolo COLPANI , Ivan VENEGONI
- Applicant: STMICROELECTRONICS S.R.L.
- Priority: IT102017000087201 20170728
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L23/525 ; H01L23/528 ; H01L23/31 ; H01L23/00

Abstract:
A semiconductor device includes a passivation layer, an interconnection metallization 37 having a peripheral portion over the passivation layer, and an outer surface coating 37 on the interconnection metallization. A diffusion barrier layer comprises an inner planar portion directly on the surface of the passivation layer and a peripheral portion extending along a plane at a vertical height higher than the surface of the passivation layer, so that the peripheral portion forms with the inner portion a step in the barrier layer. The outer surface coating, has a vertical wall with a foot adjacent to the peripheral portion and positioned at the vertical height over the surface of the passivation layer to form a hollow recess area between the surface of the passivation layer and both of the peripheral portion and the foot of the outer surface coating.
Public/Granted literature
- US10566283B2 Semiconductor device and a corresponding method of manufacturing semiconductor devices Public/Granted day:2020-02-18
Information query
IPC分类: