• Patent Title: METHODS FOR METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION USING SOLUTIONS OF INDIUM-ALKYL COMPOUNDS IN HYDROCARBONS
  • Application No.: US15778274
    Application Date: 2016-11-24
  • Publication No.: US20180355478A1
    Publication Date: 2018-12-13
  • Inventor: Jörg KOCHOliver BRIEL
  • Applicant: Umicore AG & Co. KG
  • Priority: EP15196340.2 20151125
  • International Application: PCT/EP2016/078705 WO 20161124
  • Main IPC: C23C16/40
  • IPC: C23C16/40 C30B25/02 C23C16/448 C07F5/00
METHODS FOR METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION USING SOLUTIONS OF INDIUM-ALKYL COMPOUNDS IN HYDROCARBONS
Abstract:
The invention relates to methods for producing an indium-containing layer by metal-organic vapor phase deposition, wherein the indium-containing layer is generated on a substrate in a reaction chamber, wherein the indium is delivered to the process in the form of an indium-containing precursor compound with the formula InR3, wherein the radicals R, independently of one another, are selected from alkyl radicals with 1 to 6 C atoms, characterized in that the delivery of the indium-containing precursor compound takes place in a solution that contains a solvent and the indium-containing precursor compound dissolved therein, wherein the solvent has at least one hydrocarbon with 1 to 8 carbon atoms.The invention also relates to a solution consisting of a compound of formula InR3, wherein R are selected independently of one another from alkyl radicals with 1 to 6 C atoms, and at least one hydrocarbon having 1 to 8 carbon atoms, uses of the solution for producing an indium-containing layer by metal-organic vapor deposition, and devices for executing the method.
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