Invention Application
- Patent Title: Micro ElectroMechanical System (MEMS) Energy Harvester With Residual Stress Induced Instability
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Application No.: US15769258Application Date: 2016-10-19
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Publication No.: US20180316287A1Publication Date: 2018-11-01
- Inventor: Ruize Xu , Sang-Gook Kim
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- International Application: PCT/US16/57667 WO 20161019
- Main IPC: H02N2/18
- IPC: H02N2/18

Abstract:
Described embodiments provide a Micro-Electro-Mechanical System (MEMS) vibration energy harvester. The energy harvester includes a buckled multi-layer beam that includes a plurality of stacked layers. The plurality of stacked layers includes at least one piezoelectric layer. Each one of the plurality of stacked layers has a determined stress level and a determined thickness. The determined stress level includes at least a compressive stress. The plurality of stacked layers achieves a desired total stress level of the beam to achieve substantial deformation of the beam in at least one direction when a proof mass is added to the beam. In response to applied external vibrations having a vibration frequency and an acceleration amplitude, the beam deflects and deforms to provide strain to the at least one piezoelectric layer, thereby generating an electrical charge to provide a continuous power output in response to the external vibrations.
Public/Granted literature
- US11012006B2 Micro electromechanical system (MEMS) energy harvester with residual stress induced instability Public/Granted day:2021-05-18
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