Invention Application
- Patent Title: TEMPERATURE MONITORING SYSTEM AND METHOD FOR A SUBSTRATE HEATING FURNACE
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Application No.: US15967348Application Date: 2018-04-30
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Publication No.: US20180259263A1Publication Date: 2018-09-13
- Inventor: Xin XIANG , Zhiguang GUO , Benxiang HOU , Yunjie WANG , Fan YANG
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Priority: CN201710134519.2 20170308
- Main IPC: F27D21/00
- IPC: F27D21/00 ; G01J5/00 ; G01J5/04

Abstract:
A temperature monitoring system for a substrate heating furnace includes a temperature monitor, and the temperature monitor is located on a prong of a mechanical arm which is configured to fetch and place a substrate. The temperature monitor is configured to monitor the temperature of the substrate which has been heated by the substrate heating furnace and is located on the prong.
Public/Granted literature
- US11131504B2 Temperature monitoring system and method for a substrate heating furnace Public/Granted day:2021-09-28
Information query