Invention Application
- Patent Title: RESONATOR AND RESONATION DEVICE
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Application No.: US15898300Application Date: 2018-02-16
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Publication No.: US20180175824A1Publication Date: 2018-06-21
- Inventor: WAKANA HIROTA
- Applicant: Murata Manufacturing Co., Ltd.
- Priority: JP2015-185890 20150918
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03H9/10 ; H03H9/215

Abstract:
A resonator includes a vibration portion with a base and a plurality of vibration arms each having a fixed end and a free end with the fixed end being connected to the base. Each of the plurality of vibration arms includes a piezoelectric thin film and an electrode stacked on the piezoelectric thin film. Moreover, a width of each of the plurality of vibration arms increases from the fixed end toward the free end. In addition, a width of the electrode of each of the plurality of vibration arms increases from the fixed end towards the free end of the vibration arm.
Public/Granted literature
- US10673404B2 Resonator and resonation device Public/Granted day:2020-06-02
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