- 专利标题: PACKAGING STRUCTURES FOR METALLIC BONDING BASED OPTO-ELECTRONIC DEVICE AND MANUFACTURING METHODS THEREOF
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申请号: US15718919申请日: 2017-09-28
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公开(公告)号: US20180158785A1公开(公告)日: 2018-06-07
- 发明人: Wenjian ZHANG , Qingjun ZHANG , Yuanjing LI , Zhiqiang CHEN , Ziran ZHAO , Yinong LIU , Yaohong LIU , Xiang ZOU , Huishao HE , Weishu LI , Nan BAI
- 申请人: Tsinghua University , NUCTECH COMPANY LIMITED
- 优先权: CN201611120663.2 20161207
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L31/02 ; H01L31/024 ; H01L31/18 ; H01L23/15 ; H01L23/498
摘要:
The present disclosure proposes a packaging structure for a metallic bonding based opto-electronic device and a manufacturing method thereof. According to the embodiments, the packaging structure for an opto-electronic device may comprise an opto-electronic chip and a packaging base. The opto-electronic chip comprises: a substrate having a first substrate surface and a second substrate surface opposite to each other; an opto-electronic device formed on the substrate; and electrodes for the opto-electronic device which are formed on the first substrate surface. The packaging base has a first base surface and a second base surface opposite to each other, and comprises conductive channels extending from the first base surface to the second base surface. The opto-electronic chip is stacked on the packaging base in such a manner that the first substrate surface faces the packaging base, and the electrodes formed on the first substrate surface of the opto-electronic chip are bonded with corresponding conductive channels in the packaging base.
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