- 专利标题: FORCE DETECTION SENSOR, FORCE SENSOR, TORQUE SENSOR, AND ROBOT
-
申请号: US15805777申请日: 2017-11-07
-
公开(公告)号: US20180141217A1公开(公告)日: 2018-05-24
- 发明人: Toshiyuki KAMIYA
- 申请人: Seiko Epson Corporation
- 优先权: JP2016-228406 20161124
- 主分类号: B25J13/08
- IPC分类号: B25J13/08 ; G01L1/16 ; G01G3/16 ; G01L5/22 ; G01G3/13 ; H01L41/047
摘要:
A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.
公开/授权文献
信息查询
IPC分类: