Invention Application
- Patent Title: CERAMIC RING TEST DEVICE
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Application No.: US15817599Application Date: 2017-11-20
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Publication No.: US20180073994A1Publication Date: 2018-03-15
- Inventor: Satoru Kobayashi , Yufei Zhu , Saurabh Garg , Soonam Park , Dmitry Lubomirsky
- Applicant: Applied Materials, Inc.
- Main IPC: G01N22/00
- IPC: G01N22/00

Abstract:
A test fixture includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The inner conductor includes a top portion having a first diameter, a bottom portion having a second diameter, and a third portion proximate the bottom portion that has a third diameter that is less than the second diameter and is greater than the first diameter. An electrical property of a chamber component disposed within the outer conductor is measurable based on application of a signal to at least one of the outer conductor or the inner conductor.
Public/Granted literature
- US10551328B2 Ceramic ring test device Public/Granted day:2020-02-04
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