Invention Application
- Patent Title: WET ETCHING EQUIPMENT AND WET ETCHING METHOD
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Application No.: US15534587Application Date: 2016-05-25
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Publication No.: US20180051378A1Publication Date: 2018-02-22
- Inventor: Dapeng Xue
- Applicant: BOE Technology Group Co., Ltd.
- Priority: CN201610128624.0 20160307
- International Application: PCT/CN2016/083270 WO 20160525
- Main IPC: C23F1/08
- IPC: C23F1/08 ; C23F1/46 ; H01L21/67 ; H01L21/677

Abstract:
Embodiments of the present disclosure disclose a wet etching equipment and a wet etching method. The wet etching equipment includes a metal ion concentration adjusting device configured to adjust the concentration of metal ions in an etching solution, a sprinkler which is connected to the metal ion concentration adjusting device and configured to spray the etching solution. Embodiments of the present disclosure also disclose a wet etching method, comprising steps as follows: adjusting a concentration of metal ions in an etching solution so that an etching rate of a metal to be etched is kept stable; spraying the adjusted etching solution onto the metal to be etched.
Information query
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