- 专利标题: PHOTOSENSITIVE RESIN COMPOSITION
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申请号: US15556215申请日: 2016-03-15
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公开(公告)号: US20180039174A1公开(公告)日: 2018-02-08
- 发明人: Yoshifumi IKEDA
- 申请人: TORAY INDUSTRIES, INC.
- 申请人地址: JP Tokyo
- 专利权人: TORAY INDUSTRIES, INC.
- 当前专利权人: TORAY INDUSTRIES, INC.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2015-064013 20150326
- 国际申请: PCT/JP2016/058175 WO 20160315
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/004 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; H01L23/532 ; C08G73/14 ; C08G73/22 ; C08G8/24 ; G03F7/075 ; H01L51/00 ; G03F7/023 ; G03F7/40
摘要:
Regarding cured pattern films for semiconductor apparatuses, the present invention provides a photosensitive resin composition that is high in sensitivity and able to realize improved contact between a cured pattern film and metal wiring after a reflow process. The photosensitive resin composition includes an alkali-soluble resin which contains at least one selected from the group consisting of a resin (a-1) which contains, as primary component, a structure as represented by the undermentioned general formula (1), polyimides (a-2) and copolymers thereof, and a compound (c) which contains, as primary component, a structure as represented by the undermentioned general formula (2). (In general formula (1), R1 and R2 may be identical to or different from each other and each represent a divalent to octavalent organic group having 2 or more carbon atoms; R3 and R4 may be identical to or different from each other and each represent either a hydrogen atom or an organic group having 1 to 20 carbon atoms; n is an integer of 10 to 100,000; m and f are independently an integer of 0 to 2; p and q are independently an integer of 0 to 4; and m+q≠0 and p+q≠0.) (In general formula (2), R5, R6, and R7 may be identical to or different from each other and each represent either a hydrogen atom or a monovalent organic group having 1 or more carbon atoms, and at least one of R5, R6, and R7 is a monovalent organic group having 1 or more carbon atoms.)
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