Invention Application
- Patent Title: ELECTROPLATING SYSTEM AND METHOD OF USING ELECTROPLATING SYSTEM FOR CONTROLLING CONCENTRATION OF ORGANIC ADDITIVES IN ELECTROPLATING SOLUTION
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Application No.: US15708281Application Date: 2017-09-19
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Publication No.: US20180016699A1Publication Date: 2018-01-18
- Inventor: Charles L. Arvin , Glen N. Biggs , Phillip W. Palmatier , Joseph C. Sorbello , Tracy A. Tong , Freddie Torres
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Main IPC: C25D21/18
- IPC: C25D21/18 ; C25D21/14

Abstract:
Electroplating techniques including an electroplating system and a method for using the electroplating system are provided. The electroplating system has: an electroplating apparatus for electroplating a workpiece, the electroplating apparatus has an electroplating tank configured to contain a solution including target organics; a first reservoir configured to receive the solution including the target organics from the electroplating tank, and to hold the solution including the target organics; a foaming mechanism configured to, in the first reservoir, separate the target organics from the solution through foaming action such that the solution with a reduced concentration of the target organics is separated from a foam including the separated target organics; and a diverting mechanism configured to selectively feed the solution with the reduced concentration of the target organics to one of the first reservoir and the electroplating tank of the electroplating apparatus.
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