Invention Application
- Patent Title: THIN FILM TRANSISTOR, A THIN FILM TRANSISTOR ARRAY PANEL INCLUDING THE SAME, AND A METHOD OF MANUFACTURING THE SAME
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Application No.: US15469750Application Date: 2017-03-27
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Publication No.: US20180013008A1Publication Date: 2018-01-11
- Inventor: Sung Ho KIM , Min Chul SHIN
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Priority: KR10-2016-0084909 20160705
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L27/12

Abstract:
A thin film transistor includes a semiconductor layer, a gate electrode, and an insulating layer. The semiconductor layer includes a source electrode, a drain electrode, and a channel part disposed therebetween. The gate electrode is disposed on the channel part and extends in a direction crossing a channel length direction of the semiconductor layer. The insulating layer includes a second region connected to the first region and extending in a same direction as an extending direction of the gate electrode from the first region. A hydrogen content of the source electrode or the drain electrode is in a range between a maximum hydrogen content that is larger than a hydrogen content of the second region of the insulating layer by about 10% and a minimum hydrogen content that is smaller than the hydrogen content of the second region of the insulating layer by about 10%.
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