Invention Application
- Patent Title: THERMAL COUPLED QUARTZ DOME HEAT SINK
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Application No.: US15673801Application Date: 2017-08-10
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Publication No.: US20170338135A1Publication Date: 2017-11-23
- Inventor: Joseph M. RANISH , Mehmet Tugrul SAMIR , Paul BRILLHART
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/46 ; C23C16/44

Abstract:
Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.
Information query
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