发明申请
- 专利标题: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
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申请号: US15634555申请日: 2017-06-27
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公开(公告)号: US20170301689A1公开(公告)日: 2017-10-19
- 发明人: Ji-Hoon CHOI , SeungHyun LIM , Sunggil KIM , HongSuk KIM , Hunhyeong LIM , Hyunjun SIM
- 申请人: Ji-Hoon CHOI , SeungHyun LIM , Sunggil KIM , HongSuk KIM , Hunhyeong LIM , Hyunjun SIM
- 优先权: KR10-2015-0036839 20150317
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
A semiconductor memory device includes a stack including gate electrodes sequentially stacked on a substrate, a vertical insulating structure penetrating the stack vertically with respect to the gate electrodes, a vertical channel portion disposed on an inner side surface of the vertical insulating structure, and a common source region formed in the substrate and spaced apart from the vertical channel portion. A bottom region of the vertical channel portion has a protruding surface in contact with a bottom region of the vertical insulating structure.
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