Invention Application
- Patent Title: CMP PAD CONDITIONERS WITH MOSAIC ABRASIVE SEGMENTS AND ASSOCIATED METHODS
-
Application No.: US15361166Application Date: 2016-11-25
-
Publication No.: US20170232576A1Publication Date: 2017-08-17
- Inventor: Chien-Min Sung
- Applicant: Chien-Min Sung
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B37/34 ; B24B37/20

Abstract:
A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.
Information query