- 专利标题: POLYCRYSTALLINE SILICON THIN FILM AND METHOD THEREOF, OPTICAL FILM, AND THIN FILM TRANSISTOR
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申请号: US15305588申请日: 2016-04-06
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公开(公告)号: US20170186611A1公开(公告)日: 2017-06-29
- 发明人: DONG LI , XIAOYONG LU , SHUAI ZHANG , ZHENG LIU , CHUNPING LONG
- 申请人: BOE TECHNOLOGY GROUP CO., LTD
- 优先权: CN2015-10516303.3 20150820
- 国际申请: PCT/CN2016/078561 WO 20160406
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; G02B27/09 ; H01L29/786
摘要:
In accordance with various embodiments of the disclosed subject matter, a method for forming polycrystalline silicon thin film, a related optical film, a related polycrystalline silicon thin film, and a related thin film transistor are provided. In some embodiments, the method comprises: providing an amorphous silicon thin film; and performing a laser annealing process to convert the amorphous silicon thin film into a polycrystalline silicon thin film through generating a laser irradiation having a spatially periodic intensity distribution to irradiate the amorphous silicon thin film; wherein the spatially periodic intensity distribution comprises: a first laser intensity to form a plurality of crystal nuclei regions arranged in an array, and a second laser intensity to form a plurality of epitaxial growth regions, the second laser intensity being greater than the first laser intensity.
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