发明申请
- 专利标题: INTEGRATED TIME DEPENDENT DIELECTRIC BREAKDOWN RELIABILITY TESTING
- 专利标题(中): 集成时间依赖电介质断开可靠性测试
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申请号: US15258535申请日: 2016-09-07
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公开(公告)号: US20170010322A1公开(公告)日: 2017-01-12
- 发明人: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/311
摘要:
Systems for reliability testing include a picometer configured to measure a leakage current across a device under test (DUT); a camera configured to measure optical emissions from the DUT based on a timing of the measurement of the leakage current; and a test system configured to apply a stress voltage to the DUT and to correlate the leakage current with the optical emissions using a processor to determine a time and location of a defect occurrence within the DUT by locating instances of increased noise in the leakage current that correspond in time with instances of increased optical emissions.
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