Invention Application
- Patent Title: MEASURING APPARATUS AND MEASURING METHOD
- Patent Title (中): 测量装置和测量方法
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Application No.: US15017730Application Date: 2016-02-08
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Publication No.: US20160245703A1Publication Date: 2016-08-25
- Inventor: Yasuhiro TAKASE , Hidetoshi NAKANISHI , Motohiro KONO , Kazuo KINOSE
- Applicant: SCREEN Holdings Co., Ltd.
- Priority: JP2015-030807 20150219
- Main IPC: G01J11/00
- IPC: G01J11/00 ; G01R29/08 ; G01N33/20

Abstract:
A measuring apparatus measure the amount of a metal catalyst supported on a sample that has a membrane of a metal catalyst layer containing the metal catalyst. The measuring apparatus includes a terahertz-wave emitting part that emits a terahertz wave in the range of 0.01 to 10 THz to the sample, a transmitted-terahertz-wave detection part that detects the electric field intensity of a transmitted terahertz wave that has passed through the sample, a storage that stores correlation information acquired in advance and indicating the correlation between the amount of the metal catalyst supported and the electric field intensity of the transmitted terahertz wave, and an amount-of-catalyst-supported acquisition module that acquires the amount of the metal catalyst supported on the sample, on the basis of the correlation information and the electric field intensity of the transmitted terahertz wave detected by the transmitted-terahertz-wave detection part.
Public/Granted literature
- US09766132B2 Measuring apparatus and measuring method Public/Granted day:2017-09-19
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