Invention Application
- Patent Title: LINEAR HIGH PACKING DENSITY FOR LED ARRAYS
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Application No.: US15130751Application Date: 2016-04-15
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Publication No.: US20160231055A1Publication Date: 2016-08-11
- Inventor: Joseph R. JOHNSON , Joseph M. RANISH
- Applicant: Applied Materials, Inc.
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F21K99/00 ; H01L21/67

Abstract:
Apparatus for providing energy to a process chamber are provided herein. In one embodiment, the apparatus include a supporting substrate, a first plurality of solid state light sources disposed on a first surface of the supporting substrate, and a second plurality of solid state light sources disposed on the top surface of the supporting substrate, wherein the first and second plurality of solid state light sources are aligned and electrically isolated from each other, and the first plurality of solid state light sources is in physical contact with the second plurality of solid state light sources.
Public/Granted literature
- US09513052B2 Linear high packing density for LED arrays Public/Granted day:2016-12-06
Information query
IPC分类: