发明申请
- 专利标题： METHODS OF FORMING MOLYBDENUM SPUTTERING TARGETS
- 专利标题（中）： 形成莫氏体溅射目标的方法
-
申请号： US15061566申请日： 2016-03-04
-
公开(公告)号： US20160186311A1公开(公告)日： 2016-06-30
- 发明人: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Prabhat Kumar , Steven A. Miller , Rong-chein Richard Wu , David G. Schwartz
- 申请人： Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Prabhat Kumar , Steven A. Miller , Rong-chein Richard Wu , David G. Schwartz
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; B22F1/00 ; B22F3/16 ; C21D8/02 ; B22F5/00 ; C22F1/18 ; C22C27/04 ; C23C14/14 ; B22F3/24
摘要：
In various embodiments, sputtering targets are formed by introducing molybdenum powder into a sheet bar mold, pressing the powder to form a sheet bar, sintering the sheet bar to form an ingot having a density of at least 90% of a theoretical density, preheating the ingot, rolling the ingot to form a plate, and heat treating the plate.
公开/授权文献
- US09926623B2 Methods of forming molybdenum sputtering targets 公开/授权日：2018-03-27
信息查询
IPC分类:
