Invention Application
US20160118533A1 METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE
审中-公开
制造纳米结构半导体发光器件的方法
- Patent Title: METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE
- Patent Title (中): 制造纳米结构半导体发光器件的方法
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Application No.: US14887466Application Date: 2015-10-20
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Publication No.: US20160118533A1Publication Date: 2016-04-28
- Inventor: MISAICHI TAKEUCHI , Sam Mook KANG , Shigeru INOUE , Ki Se KIM
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2014-0146874 20141028
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/24 ; H01L33/06

Abstract:
A method of manufacturing a nanostructure semiconductor light emitting device may include: stacking a mask layer on a conductive base layer and forming a through hole penetrating the mask layer; growing a nanocore through the through hole from the conductive base layer using precursor gas including indium-containing precursor gas in a mixed gas atmosphere of nitrogen and hydrogen; removing the mask layer; and sequentially growing an active layer and a first conductivity type semiconductor layer on a surface of the nanocore.
Information query
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