发明申请
- 专利标题: FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS
- 专利标题(中): 流量范围可变型流量控制装置
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申请号: US14977162申请日: 2015-12-21
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公开(公告)号: US20160109886A1公开(公告)日: 2016-04-21
- 发明人: Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
- 申请人: Fujikin Incorporated , National University Corporation Tohoku University , Tokyo Electron Ltd.
- 优先权: JP2005-185845 20050627
- 主分类号: G05D7/06
- IPC分类号: G05D7/06 ; G01F1/684
摘要:
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
公开/授权文献
- US09383758B2 Flow rate range variable type flow rate control apparatus 公开/授权日:2016-07-05
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