Invention Application
US20160069683A1 PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
有权
物理量传感器元件，物理量传感器，电子设备和可移动体
- Patent Title: PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
- Patent Title (中): 物理量传感器元件，物理量传感器，电子设备和可移动体
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Application No.: US14844032Application Date: 2015-09-03
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Publication No.: US20160069683A1Publication Date: 2016-03-10
- Inventor: Makoto FURUHATA
- Applicant: Seiko Epson Corporation
- Priority: JP2014-181048 20140905
- Main IPC: G01C19/5705
- IPC: G01C19/5705
Abstract:
A physical quantity sensor element is formed into a plane-shape which extends along an XY plane, and is provided with a driving portion which vibrates in a Z-axis direction, a detecting portion which vibrates in an X-axis direction due to Coriolis effect acting on the driving portion, a beam portion which connects the driving portion and the detecting portion, a fixing portion, and a beam portion which connects the detecting portion and the fixing portion, in which a spring constant of the beam portion in the Z-axis direction is smaller than a spring constant of the beam portion in the Z-axis direction, and a spring constant of the beam portion in the Z-axis direction is greater than a spring constant of the beam portion in the X-axis direction.
Public/Granted literature
- US09939268B2 Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body Public/Granted day:2018-04-10
Information query
