发明申请
US20160041063A1 LIGHT SPOT CENTROID POSITION ACQUISITION METHOD FOR WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT METHOD, WAVEFRONT MEASUREMENT APPARATUS AND STORAGE MEDIUM STORING LIGHT SPOT CENTROID POSITION ACQUISITION PROGRAM
审中-公开
用于波前传感器的光点中心位置采集方法，WAVEFRONT测量方法，WAVEFRONT测量装置和存储介质存储光点中心位置采集程序
- 专利标题： LIGHT SPOT CENTROID POSITION ACQUISITION METHOD FOR WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT METHOD, WAVEFRONT MEASUREMENT APPARATUS AND STORAGE MEDIUM STORING LIGHT SPOT CENTROID POSITION ACQUISITION PROGRAM
- 专利标题（中）： 用于波前传感器的光点中心位置采集方法，WAVEFRONT测量方法，WAVEFRONT测量装置和存储介质存储光点中心位置采集程序
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申请号： US14818703申请日： 2015-08-05
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公开(公告)号： US20160041063A1公开(公告)日： 2016-02-11
- 发明人: Yasunori Furukawa
- 申请人： CANON KABUSHIKI KAISHA
- 优先权： JP2014-161973 20140808
- 主分类号： G01M11/02
- IPC分类号： G01M11/02
摘要：
The method enables acquiring centroid positions of light spots formed on an optical detector by multiple microlenses arranged mutually coplanarly in a wavefront sensor. The method includes a first step of estimating, by using known centroid positions or known intensity peak positions of first and second light spots respectively formed by first and second microlenses in the multiple microlenses, a position of a third light spot formed by a third microlens, a second step of setting, by using the estimated position of the third light spot, a calculation target area for a centroid position of the third light spot on the optical detector, and a third step of calculating the centroid position of the third light spot in the calculation target area.
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