发明申请
- 专利标题: ZINC OXIDE SPUTTERING TARGET
- 专利标题(中): ZINC氧化物溅射目标
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申请号: US14848842申请日: 2015-09-09
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公开(公告)号: US20150376024A1公开(公告)日: 2015-12-31
- 发明人: Jun YOSHIKAWA , Katsuhiro IMAI , Koichi KONDO , Koki KANNO
- 申请人: NGK Insulators, Ltd.
- 优先权: JP2013-061450 20130325; JP2013-203500 20130930
- 主分类号: C01G9/02
- IPC分类号: C01G9/02 ; C23C14/34
摘要:
Provided is a zinc oxide-based sputtering target capable of improving the film formation rate while suppressing arcing in the formation of a zinc oxide-based transparent conductive film by sputtering. This zinc oxide-based sputtering target includes a zinc oxide-based sintered body mainly including zinc oxide crystal grains, and has a degree of (002) orientation of 50% or greater at a sputtering surface and a density of 5.30 g/cm3 or greater.
公开/授权文献
- US09919931B2 Zinc oxide sputtering target 公开/授权日:2018-03-20
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