Invention Application
US20150333097A1 VERY SMALL PIXEL PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING THEREOF 有权
非常小的像素PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING

  • Patent Title: VERY SMALL PIXEL PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING THEREOF
  • Patent Title (中): 非常小的像素PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING
  • Application No.: US14139071
    Application Date: 2013-12-23
  • Publication No.: US20150333097A1
    Publication Date: 2015-11-19
  • Inventor: Pradip Mitra
  • Applicant: DRS RSTA, Inc.
  • Applicant Address: US TX Dallas
  • Assignee: DRS RSTA, Inc.
  • Current Assignee: DRS RSTA, Inc.
  • Current Assignee Address: US TX Dallas
  • Main IPC: H01L27/146
  • IPC: H01L27/146
VERY SMALL PIXEL PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING THEREOF
Abstract:
A method for manufacturing an imaging device is provided. The method comprises forming a contact pad over a semiconductor substrate. The contact pad has a malleable metal. The method further comprises providing a readout circuit having a first side and a contact plug. The contact plug has a base affixed to the first side of the readout circuit and a plurality of prongs extending from the base away from the first side. The first side of the readout circuit is moved towards the substrate so that the prongs of the contact plug are pressed into the pad and displace a portion of the pad into a space defined by and between a first and a second of the prongs. Stop elements formed over the substrate are aligned with and contact stop elements provided on the readout circuit so that the prongs are inhibited from passing completely through the contact pad.
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