发明申请
- 专利标题: PLASMA DEVICE
- 专利标题(中): 等离子体装置
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申请号: US14509051申请日: 2014-10-08
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公开(公告)号: US20150303034A1公开(公告)日: 2015-10-22
- 发明人: Yi-Ming Hsu , Li-Min Wang , An-Jen Li
- 申请人: Creating Nano Technologies, Inc.
- 优先权: TW103113891 20140416
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma device including a casing, a first electrode, a second electrode, a nozzle and a gas ejection port is provided. The casing has a first chamber. The first electrode is disposed within the first chamber and has a second chamber. The second electrode capable of rotating in relative to the casing has a third chamber connected with the second chamber. The second chamber and the third chamber are adapted for accommodating plasma formed between the first electrode and the second electrode. The nozzle and the gas ejection port are independently disposed at the bottom of the second electrode respectively, wherein the nozzle is configured to eject the plasma, and forms an included angle with or is spaced a distance apart from a rotating axis of the second electrode. The gas ejection port is configured to eject cold gas.
公开/授权文献
- US09320125B2 Plasma device 公开/授权日:2016-04-19
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