发明申请
US20150299050A1 CERAMIC COATED ARTICLE AND PROCESS FOR APPLYING CERAMIC COATING
审中-公开
陶瓷涂层制品和应用陶瓷涂料的方法
- 专利标题： CERAMIC COATED ARTICLE AND PROCESS FOR APPLYING CERAMIC COATING
- 专利标题（中）： 陶瓷涂层制品和应用陶瓷涂料的方法
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申请号： US14789915申请日： 2015-07-01
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公开(公告)号： US20150299050A1公开(公告)日： 2015-10-22
- 发明人: Jennifer Y. Sun , Biraja P. Kanungo , Ren-Guan Duan , Sumit Agarwal , Dmitry Lubomirsky
- 申请人： Applied Materials, Inc.
- 主分类号： C04B35/505
- IPC分类号： C04B35/505 ; C04B35/622 ; C04B35/626 ; C23C4/12
摘要：
To manufacture a ceramic article, a ceramic body comprising Al2O3 is roughened to a roughness of approximately 140 micro-inches (μin) to 240 μin. The ceramic body is subsequently cleaned and then coated with a ceramic coating. The ceramic coating comprises a compound of Y4Al2O9 (YAM) and a solid solution of Y2-xZrxO3. The ceramic coating is then polished.
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