Invention Application
US20150277105A1 MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER
有权
具有线圈的MEMS扫描仪和用于MEMS扫描仪的线圈的制造方法
- Patent Title: MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER
- Patent Title (中): 具有线圈的MEMS扫描仪和用于MEMS扫描仪的线圈的制造方法
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Application No.: US14674799Application Date: 2015-03-31
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Publication No.: US20150277105A1Publication Date: 2015-10-01
- Inventor: Joodo PARK , Chihwan JEONG
- Applicant: LG ELECTRONICS INC.
- Applicant Address: KR Seoul
- Assignee: LG ELECTRONICS INC.
- Current Assignee: LG ELECTRONICS INC.
- Current Assignee Address: KR Seoul
- Priority: KR10-2014-0038793 20140401
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10

Abstract:
The present disclosure may provide a MEMS scanner including a mirror configured to reflect light, a gimbal connected to the mirror to rotatably support the mirror, and a winding portion provided at the mirror or the gimbal to generate an electromagnetic force in interaction with a magnetic field formed in the vicinity when a current flows therethrough so as to adjust a rotational angle of the mirror, wherein the winding portion includes a silicon layer, a coil layer deposited on the silicon layer to generate physical deformation due to a current flowing therethrough, and a plurality of hollow holes formed on the coil layer to provide elasticity so as to reduce an amount of impact due to the physical deformation, and increase the dissipation area of heat generated.
Public/Granted literature
- US09778456B2 MEMS scanner having coil and manufacturing method of coil for MEMS scanner Public/Granted day:2017-10-03
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