Invention Application
- Patent Title: APPARATUS AND METHOD FOR COATING ORGANIC FILM
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Application No.: US14708786Application Date: 2015-05-11
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Publication No.: US20150240345A1Publication Date: 2015-08-27
- Inventor: Wulin SHEN , Chunsheng JIANG , Qing DAI , Haijing CHEN , Guangcai YUAN , Jingang FANG
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Priority: CN201310231659.3 20130609
- Main IPC: C23C14/30
- IPC: C23C14/30 ; C23C14/04

Abstract:
An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.
Public/Granted literature
- US09273390B2 Apparatus and method for coating organic film Public/Granted day:2016-03-01
Information query
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