发明申请
US20150213180A1 INTEGRAL FABRICATION OF ASYMMETRIC CMOS TRANSISTORS FOR AUTONOMOUS WIRELESS STATE RADIOS AND SENSOR/ACTUATOR NODES
有权
用于自动无线状态无线电和传感器/执行器编号的不对称CMOS晶体管的集成制造
- 专利标题: INTEGRAL FABRICATION OF ASYMMETRIC CMOS TRANSISTORS FOR AUTONOMOUS WIRELESS STATE RADIOS AND SENSOR/ACTUATOR NODES
- 专利标题(中): 用于自动无线状态无线电和传感器/执行器编号的不对称CMOS晶体管的集成制造
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申请号: US14168665申请日: 2014-01-30
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公开(公告)号: US20150213180A1公开(公告)日: 2015-07-30
- 发明人: Rainer Herberholz
- 申请人: CAMBRIDGE SILICON RADIO LIMITED
- 申请人地址: GB Cambridge
- 专利权人: CAMBRIDGE SILICON RADIO LIMITED
- 当前专利权人: CAMBRIDGE SILICON RADIO LIMITED
- 当前专利权人地址: GB Cambridge
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method of arranging asymmetrically doped CMOS transistors in a semiconductor wafer that forms base cells within a plurality of logic standard cells in a CMOS process technology that includes conventional symmetric CMOS transistors having different threshold voltages. The asymmetrically doped CMOS transistors have a gate length exceeding 1.5 times the minimum gate length of the symmetric CMOS transistors. Regions defined by electrical junctions directly adjacent to the gate of the asymmetric transistors are formed by an implant mask exposing an area of the wafer on the source side of the transistor to receive the junction implant of the symmetric CMOS transistors with a higher threshold voltage while shielding the drain area, and a further implant mask exposing an area of the wafer on the drain side of the transistor to receive the junction implant of the symmetric CMOS transistors with a lower threshold voltage while shielding the source area.
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