Invention Application
- Patent Title: SOL GEL COATED SUPPORT RING
- Patent Title (中): SOL胶涂层支撑环
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Application No.: US14521545Application Date: 2014-10-23
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Publication No.: US20150123337A1Publication Date: 2015-05-07
- Inventor: Joseph M. RANISH
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/687
- IPC: H01L21/687
Abstract:
A support member for a thermal processing chamber is described. The support member has a sol coating on at least one surface. The sol coating contains a material that blocks a desired wavelength or spectrum of radiation from being transmitted by the material of the support member. The sol coating may be a multi-layer structure that may include adhesion layers, transition layers, and cap layers, in addition to radiation-blocking layers.
Public/Granted literature
- US09929037B2 Sol gel coated support ring Public/Granted day:2018-03-27
Information query
IPC分类:
