Invention Application
US20150115394A1 Semiconductor Device and Method of Forming a Shielding Layer Between Stacked Semiconductor Die 有权
半导体器件和堆叠半导体晶片之间形成屏蔽层的方法

Semiconductor Device and Method of Forming a Shielding Layer Between Stacked Semiconductor Die
Abstract:
A semiconductor device has a first semiconductor die with a shielding layer formed over its back surface. The first semiconductor die is mounted to a carrier. A first insulating layer is formed over the shielding layer. A second semiconductor die is mounted over the first semiconductor die separated by the shielding layer and first insulating layer. A second insulating layer is deposited over the first and second semiconductor die. A first interconnect structure is formed over the second semiconductor die and second insulating layer. A second interconnect structure is formed over the first semiconductor die and second insulating layer. The shielding layer is electrically connected to a low-impedance ground point through a bond wire, RDL, or TSV. The second semiconductor die may also have a shielding layer formed on its back surface. The semiconductor die are bonded through the metal-to-metal shielding layers.
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