Invention Application
- Patent Title: Semiconductor Device and Method of Forming a Shielding Layer Between Stacked Semiconductor Die
- Patent Title (中): 半导体器件和堆叠半导体晶片之间形成屏蔽层的方法
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Application No.: US14553358Application Date: 2014-11-25
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Publication No.: US20150115394A1Publication Date: 2015-04-30
- Inventor: Reza A. Pagaila , Byung Tai Do , Nathapong Suthiwongsunthorn
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS CHIPPAC, LTD.
- Current Assignee: STATS CHIPPAC, LTD.
- Current Assignee Address: SG Singapore
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/50 ; H01L23/48 ; H01L21/768 ; H01L23/00

Abstract:
A semiconductor device has a first semiconductor die with a shielding layer formed over its back surface. The first semiconductor die is mounted to a carrier. A first insulating layer is formed over the shielding layer. A second semiconductor die is mounted over the first semiconductor die separated by the shielding layer and first insulating layer. A second insulating layer is deposited over the first and second semiconductor die. A first interconnect structure is formed over the second semiconductor die and second insulating layer. A second interconnect structure is formed over the first semiconductor die and second insulating layer. The shielding layer is electrically connected to a low-impedance ground point through a bond wire, RDL, or TSV. The second semiconductor die may also have a shielding layer formed on its back surface. The semiconductor die are bonded through the metal-to-metal shielding layers.
Public/Granted literature
- US09583446B2 Semiconductor device and method of forming a shielding layer between stacked semiconductor die Public/Granted day:2017-02-28
Information query
IPC分类: