Invention Application
- Patent Title: RADIATION DETECTOR AND RADIATION DETECTION APPARATUS
- Patent Title (中): 辐射探测器和辐射检测装置
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Application No.: US14478424Application Date: 2014-09-05
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Publication No.: US20150084149A1Publication Date: 2015-03-26
- Inventor: Hitoshi YAGI , Rei HASEGAWA , Masaki ATSUTA , Yasuharu HOSONO , Keita SASAKI , Go KAWATA
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Priority: JP2013-195677 20130920
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0224
Abstract:
A radiation detector according to an embodiment includes: a semiconductor substrate; a light detecting unit provided on a side of a first surface of the semiconductor substrate; a first insulating film provided covering the light detecting unit; a second insulating film covering the first insulating film; a scintillator provided on the second insulating film; an interconnection provided between the first and second insulating films, and connected to the light detecting unit; a first electrode connected to the interconnection through a bottom portion of the first opening; a second electrode provided on a region in the second surface of the semiconductor substrate, the region opposing at least a part of the light detecting unit; a second opening provided in a region surrounding the first electrode and not surrounding the second electrode; and an insulating resin layer covering the first and second electrodes and the first and second openings.
Information query
IPC分类:
