发明申请
- 专利标题: FABRICATION OF A SUBSTRATE WITH AN EMBEDDED DIE USING PROJECTION PATTERNING AND ASSOCIATED PACKAGE CONFIGURATIONS
- 专利标题(中): 使用投影图案和相关包装配置制作具有嵌入式模板的基板
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申请号: US13968271申请日: 2013-08-15
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公开(公告)号: US20150048515A1公开(公告)日: 2015-02-19
- 发明人: Chong Zhang , Stefanie M. Lotz , Islam A. Salama
- 申请人: Chong Zhang , Stefanie M. Lotz , Islam A. Salama
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/538
摘要:
Embodiments of the present disclosure are directed towards techniques and configurations for using projection patterning in making an electronic substrate with an embedded die. In one embodiment, a method may include providing a die embedded in dielectric material of a substrate, and projecting a laser beam through a mask with a preconfigured pattern to create a projected mask pattern on a surface of the dielectric material in accordance with the preconfigured pattern. The projected mask pattern may include a via disposed over the die. Other embodiments may be described and/or claimed.
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