Invention Application
- Patent Title: PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE
- Patent Title (中): 颗粒减少通过节流门阀
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Application No.: US14276289Application Date: 2014-05-13
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Publication No.: US20140366953A1Publication Date: 2014-12-18
- Inventor: JARED AHMAD LEE , DMITRY LUBOMIRSKY , MARTIN JEFF SALINAS , ANDREW NGUYEN , TOM K. CHO , ERIC A. ENGLHARDT , FERNANDO SILVEIRA
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: F16K3/02
- IPC: F16K3/02 ; B08B9/032

Abstract:
Methods and apparatus for particle reduction in throttle gate valves used in substrate process chambers are provided herein. In some embodiments, a gate valve for use in a process chamber includes a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a plurality of gas ports disposed in the gate valve configured to direct a gas flow into a portion of the gate valve fluidly coupled to the opening.
Public/Granted literature
- US10010912B2 Particle reduction via throttle gate valve purge Public/Granted day:2018-07-03
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