Invention Application
US20140366953A1 PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE 有权
颗粒减少通过节流门阀

PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE
Abstract:
Methods and apparatus for particle reduction in throttle gate valves used in substrate process chambers are provided herein. In some embodiments, a gate valve for use in a process chamber includes a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a plurality of gas ports disposed in the gate valve configured to direct a gas flow into a portion of the gate valve fluidly coupled to the opening.
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