发明申请
US20140246646A1 SEMICONDUCTOR STORAGE DEVICE AND METHOD OF FABRICATING SAME 有权
半导体存储器件及其制造方法

  • 专利标题: SEMICONDUCTOR STORAGE DEVICE AND METHOD OF FABRICATING SAME
  • 专利标题(中): 半导体存储器件及其制造方法
  • 申请号: US14349386
    申请日: 2011-10-07
  • 公开(公告)号: US20140246646A1
    公开(公告)日: 2014-09-04
  • 发明人: Yoshitaka SasagoMasaharu Kinoshita
  • 申请人: Yoshitaka SasagoMasaharu Kinoshita
  • 国际申请: PCT/JP2011/005641 WO 20111007
  • 主分类号: H01L27/24
  • IPC分类号: H01L27/24
SEMICONDUCTOR STORAGE DEVICE AND METHOD OF FABRICATING SAME
摘要:
A memory cell array having such a structure that can be realized with a simpler process and ideal for realizing a higher density is provided. Memory cells have a structure in which channel layers (88p and 89p) are formed on the side surfaces of each of a plurality of stacked structures which extends in the Y direction and is periodically formed in the X direction with a gate insulator film layer (9) interposed, and a resistance-change material layer (7) is formed so as to be electrically connected to two adjacent channel layers of the channel layers. Due to such a structure, it is not necessary to perform such a very difficult step that processes the resistance-change material and the silicons collectively and it is possible to provide the memory cell array with a simpler process.
公开/授权文献
信息查询
0/0