发明申请
- 专利标题: SEMICONDUCTOR STORAGE DEVICE AND METHOD OF FABRICATING SAME
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US14349386申请日: 2011-10-07
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公开(公告)号: US20140246646A1公开(公告)日: 2014-09-04
- 发明人: Yoshitaka Sasago , Masaharu Kinoshita
- 申请人: Yoshitaka Sasago , Masaharu Kinoshita
- 国际申请: PCT/JP2011/005641 WO 20111007
- 主分类号: H01L27/24
- IPC分类号: H01L27/24
摘要:
A memory cell array having such a structure that can be realized with a simpler process and ideal for realizing a higher density is provided. Memory cells have a structure in which channel layers (88p and 89p) are formed on the side surfaces of each of a plurality of stacked structures which extends in the Y direction and is periodically formed in the X direction with a gate insulator film layer (9) interposed, and a resistance-change material layer (7) is formed so as to be electrically connected to two adjacent channel layers of the channel layers. Due to such a structure, it is not necessary to perform such a very difficult step that processes the resistance-change material and the silicons collectively and it is possible to provide the memory cell array with a simpler process.
公开/授权文献
- US09293508B2 Semiconductor storage device and method of fabricating same 公开/授权日:2016-03-22
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