Invention Application
US20140245608A1 METHOD AND APPARATUS FOR LASER-BEAM PROCESSING AND METHOD FOR MANUFACTURING INK JET HEAD
审中-公开
激光加工的方法和装置及制造喷墨头的方法
- Patent Title: METHOD AND APPARATUS FOR LASER-BEAM PROCESSING AND METHOD FOR MANUFACTURING INK JET HEAD
- Patent Title (中): 激光加工的方法和装置及制造喷墨头的方法
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Application No.: US14349477Application Date: 2012-10-03
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Publication No.: US20140245608A1Publication Date: 2014-09-04
- Inventor: Hiroyuki Morimoto , Kosuke Kurachi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Ohta-ku, Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Ohta-ku, Tokyo
- Priority: JP2011-222731 20111007; JP2011-274375 20111215
- International Application: PCT/JP2012/006324 WO 20121003
- Main IPC: B23K26/36
- IPC: B23K26/36 ; B23K26/40 ; B41J2/16 ; B23K26/12

Abstract:
In removal processing using a pulsed laser beam, processing deviation occurs in the depthwise direction to cause a processing error in a predetermined removal shape.A first pulsed laser beam L1 is a pulsed laser beam having a wavelength that exhibits transmittance to a workpiece 6, and a second pulsed laser beam L2 is a pulsed laser beam having a wavelength that exhibits absorption to the workpiece 6. The first pulsed laser beam L1 is focused into the workpiece 6, and a focal point P1 of the first pulsed laser beam L1 is scanned along the outline of a predetermined removal region R1 to form a modified portion 6A along the outline of the predetermined removal region R1. Next, removal processing is performed by scanning the second pulsed laser beam L2 in a region enclosed by the modified portion 6A.
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