知搜-全球专利检索

  1. Login
  2. Sign Up
Invention Application
US20140226449A1 METHOD OF FABRICATING A SINGLE-PIECE MICROMECHANICAL COMPONENT INCLUDING AT LEAST TWO DISTINCT FUNCTIONAL LEVELS 有权
制作单层微机电组件的方法，包括至少两个不同功能水平

  • Patent Title: METHOD OF FABRICATING A SINGLE-PIECE MICROMECHANICAL COMPONENT INCLUDING AT LEAST TWO DISTINCT FUNCTIONAL LEVELS
  • Patent Title (中): 制作单层微机电组件的方法，包括至少两个不同功能水平
  • Application No.: US14176322
    Application Date: 2014-02-10
  • Publication No.: US20140226449A1
    Publication Date: 2014-08-14
  • Inventor: Alexandre FUSSINGER , Marc Stranczl
  • Applicant: Nivarox-FAR S.A.
  • Applicant Address: CH Le Locle
  • Assignee: Nivarox-FAR S.A.
  • Current Assignee: Nivarox-FAR S.A.
  • Current Assignee Address: CH Le Locle
  • Priority: EP13155068.3 20130213
  • Main IPC: H03H3/007
  • IPC: H03H3/007
METHOD OF FABRICATING A SINGLE-PIECE MICROMECHANICAL COMPONENT INCLUDING AT LEAST TWO DISTINCT FUNCTIONAL LEVELS
Abstract:
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.
Abstract(Chinese):

本发明涉及制造包括至少两个不同功能水平的单件微机械部件的方法。 根据本发明，该方法包括在单个级别上的LIGA工艺，以及直接在衬底上加工LIGA沉积。

Public/Granted literature
Information query
Global Dossier Espacenet
Patent Agency Ranking
0/0