发明申请
US20140208850A1 APPARATUS AND METHOD OF DETECTING A DEFECT OF A SEMICONDUCTOR DEVICE
审中-公开
检测半导体器件缺陷的装置和方法
- 专利标题： APPARATUS AND METHOD OF DETECTING A DEFECT OF A SEMICONDUCTOR DEVICE
- 专利标题（中）： 检测半导体器件缺陷的装置和方法
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申请号： US13753111申请日： 2013-01-29
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公开(公告)号： US20140208850A1公开(公告)日： 2014-07-31
- 发明人: Geun-woo Kim , Hyun Kim , Yun-sik Yoo , Sang-jun Kim , Jae-yong Park , Tae-gyeong Chung
- 申请人： Geun-woo Kim , Hyun Kim , Yun-sik Yoo , Sang-jun Kim , Jae-yong Park , Tae-gyeong Chung
- 主分类号： G01N29/14
- IPC分类号： G01N29/14
摘要：
A semiconductor device defect detecting apparatus including: a sensor disposed on semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the semiconductor process equipment; and a signal analyzer configured to determine whether the semiconductor device is defective based on the detected signal in a predetermined frequency range.
信息查询
