发明申请
US20140170441A1 TiAgN COATING LAYER, TiAgN COATING METHOD AND TiAgN COATING APPARATUS 审中-公开
TiAgN涂层,TiAgN涂层方法和TiAgN涂层设备

TiAgN COATING LAYER, TiAgN COATING METHOD AND TiAgN COATING APPARATUS
摘要:
Disclosed is a TiAgN coating layer, which is coated by plasma coating method using nitrogen gas, a Ti source and a Ag source, the coating layer comprising Ag in the coating layer at an amount of about 15 at % or more, a TiAgN coating method, and a TiAgN coating apparatus therefor.
信息查询
0/0