Invention Application
- Patent Title: LAMINATE
- Patent Title (中): 层压板
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Application No.: US14043135Application Date: 2013-10-01
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Publication No.: US20140091678A1Publication Date: 2014-04-03
- Inventor: Takaaki KOIZUMI , Takashi EBIGASE , Shinya TAKEMURA
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya-City
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya-City
- Priority: JP2012-220296 20121002
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A piezoelectric/electrostrictive film type element includes a lower electrode, a piezoelectric layer, and an upper electrode laminated in order on a support. An average particle diameter of each of particles of a piezoelectric material forming the piezoelectric layer falls within a range of 0.5 μm to 10 μm. The sectional shape of the piezoelectric layer is a “quadrilateral (substantially rectangular shape) having a height of from 0.5 μm to 15 μm and an angle (θ) at an end point of a base of from 85° to 105°.” A surface roughness of a side surface of the piezoelectric layer is 0.05 dμm to 0.5 dμm at the maximum height roughness Rz (defined by JIS B 0601:2001). Both “generation of a leak current that flows through the piezoelectric layer” and “occurrence of particle shedding from a side surface of the piezoelectric layer” can be prevented.
Information query
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