发明申请
- 专利标题: METHOD AND APPARATUS FOR BONDING WORKPIECES TOGETHER
- 专利标题(中): 用于连接工件的方法和装置
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申请号: US14111548申请日: 2012-04-12
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公开(公告)号: US20140027054A1公开(公告)日: 2014-01-30
- 发明人: Keita Yoshihara , Shinji Suzuki , Kinichi Morita , Hideki Fujitsugu
- 申请人: Keita Yoshihara , Shinji Suzuki , Kinichi Morita , Hideki Fujitsugu
- 申请人地址: JP Tokyo
- 专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-094070 20110420
- 国际申请: PCT/JP2012/059990 WO 20120412
- 主分类号: B32B37/14
- IPC分类号: B32B37/14
摘要:
Two workpieces composed of a resin workpiece and a resin workpiece, or composed of a resin workpiece and a glass substrate are bonded to each other such that troubles, such as an alignment shift and breakage etc. are not generated, while ensuring bonding uniformity. A first workpiece is placed on an inverting stage of an inverting stage unit, a second workpiece is placed on a work stage of a pressurizing stage unit, and UV light is radiated from a light irradiation unit. Then, the inverting stage is inverted 180°, the workpieces are overlapped each other on the work stage, and the workpieces are pressurized and pre-bonded to each other. Then, the workpieces in the pre-bonded state are transferred to a heating stage by a transfer means, the temperature of the workpieces is increased to a predetermined temperature by heating the workpieces, and the temperature is maintained until bonding is completed.
公开/授权文献
- US09511574B2 Method and apparatus for bonding workpieces together 公开/授权日:2016-12-06
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