Invention Application
US20140017820A1 Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
有权
具有改进的磁性器件应用的平面各向异性的Co / Ni多层
- Patent Title: Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
- Patent Title (中): 具有改进的磁性器件应用的平面各向异性的Co / Ni多层
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Application No.: US14032599Application Date: 2013-09-20
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Publication No.: US20140017820A1Publication Date: 2014-01-16
- Inventor: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- Applicant: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- Applicant Address: US CA Milpitas
- Assignee: MAGIC TECHNOLOGIES, INC.
- Current Assignee: MAGIC TECHNOLOGIES, INC.
- Current Assignee Address: US CA Milpitas
- Main IPC: H01L43/12
- IPC: H01L43/12

Abstract:
A method for forming a MTJ in a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
Public/Granted literature
- US08962348B2 Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications Public/Granted day:2015-02-24
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