Embodiments relate to systems and methods for defect detection and localization in semiconductor chips. In an embodiment, a plurality of registers is arranged in a semiconductor chip. The particular number of registers can vary according to a desired level of localization, and the plurality of registers are geometrically distributed such that defect detection and localization over the entire chip area or a desired chip area, such as a central active region, is achieved in embodiments. In operation, a defect detection and localization routine can be run in parallel with other normal chip functions during a power-up or other phase. In embodiments, the registers can be multi-functional in that they can be used for other operational functions of the chip when not used for defect detection and localization, and vice-versa. Embodiments thereby provide fast, localized defect detection.